To support the epitaxial deposition process, GlobiTech operates a 125,000 square foot facility. Currently in production are two 8,000 square foot Class-1 cleanrooms (Fab 1/Fab2) for 100mm through 200mm epi wafer production. Both cleanrooms utilize ballroom equipment configuration for optimal equipment placement and product flow. Waffle deck flooring is incorporated to provide uniform airflow throughout the room.
The facility is equipped with the following systems to support the cleanrooms and the epitaxial process:
GlobiTech’s factory was designed to employ the most advanced factory management systems. Automation and CIM (Computer Integrated Manufacturing) systems allow single wafer tracking throughout the factory, resulting in obtaining process history of every wafer throughout the process. Single wafer data combined with real-time statistical process control facilitates high quality and lower cost of ownership. GlobiTech’s CIM capabilities include:
